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Politics : Formerly About Applied Materials

AMAT 268.87

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Jan 2 9:30 AM EST

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To: davesd who wrote (10214)	11/1/1997 11:09:00 PM
From: Big Bucks	of 70976

Dave, Fab automation will certainly be a requirement as devices continue to get smaller and wafers get bigger. I am not well versed in this realm but have seen fabs with ASYST automation for microcontamination control. Basically it is a special storage/transport box of clear plastic that "separates" when inserted into the cassette transport assembly which then removes the cassette and moves it into the loader assembly of the production equipment. I think the particle specs are on the order of <0.01 particles per cm^2 on 8" wafers. Since the human factor is the largest particle generator inside a fab (excluding process generated particles) and the 300mm wafers are so awkward to handle, it makes sense that factory automation will be a necessary requirement in the highest technology fabs of the future. There are many automated fabs already in Japan and some Pacific rim countries, also some US and European fabs are automated. BB

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