Here is a statement from TRKN's Q4 earnings release.....
"Delivery of three production systems to Hyundai highlighted 1996's results for PMT's MORI high density plasma (HDP) etch system. In
addition, PMT received repeat orders in 1996 from Texas Instruments and LG Semicon, as well as a first system order from IBM, LSI
Logic, Sharp, and Daewoo. To date, the total number of companies that have purchased PMT's MORI HDP etch systems for R&D and
production now exceeds twelve."
This is from another press release.....
"The Pinnacle 8000R is being used for etching poly, metal, oxide, and integrated stack etch applications. Customers in Japan,
U.S., and Korea are already using the Pinnacle 8000R for developing .35um, .25um, .18um and .10um devices. Currently, the
system is under evaluation with many major semiconductor manufacturers including Texas Instruments, Hyundai, IBM,
Toshiba, LG Semicon, Sharp, and LSI Logic. In 1996, Hyundai became the first major manufacturer to put multiple systems
into production.
It is clear from these statements that the MORI source is in production in FABs.
dave |
