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To: FJB who wrote (24862)	5/4/2000 2:26:00 PM
From: Backfill	of 25960

A "new" method of lithographic imaging, called Reference Distribution Aerial Image Formation (RIF), has been proposed by Mulith, a small optical design company. The fundamental concept involves image reconstruction from interference of the projected demagnified image with a reference plane wave which is phase-correlated to the main image. While more study may be warranted, the technique appears to have little practical value because of the inherent control problems (stability, speckle, etc.) associated with image formation from highly coherent sources. A similar technique called Imaging Interference Lithography (IIL) was proposed to Sematech by researchers at UNM in 1998. Sematech opted not to fund IIL because of the unrealistic system tolerancing specs that would be necessary to implement the technique.

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