Philips Research Selects Applied Materials' RTP System
RTP Centura will be used to develop future applications at Philips
SANTA CLARA, Calif.--(BUSINESS WIRE)--April 25, 1997--Applied Materials, Inc., a leading global supplier of rapid
thermal processing (RTP) equipment, has delivered an RTP Centura to Philips Research in Eindhoven, the Netherlands. The
RTP system will be used for advanced 0.25 micron and beyond process development that will ultimately by transitioned to
Philips' semiconductor manufacturing sites.
Dr. Mart Graef, department head for semiconductor process modules at Philips Research, said, "Having Applied Materials'
advanced RTP technology enables us to explore a number of new designs going forward for several device generations. RTP
is a key technology for high-speed logic devices below 0.25 micron, and the RTP Centura has already exceeded our
expectations for deep submicron process performance."
The RTP Centura was specifically designed to enable users to precisely measure and control wafer temperature. The system's
patented Honeycomb Source(TM) has multiple heating zones, each of which is adjusted 20 times per second using data
collected from several temperature sensors positioned below the backside of the wafer. The RTP Centura's exclusive
Emissometer enables accurate wafer temperature measurement regardless of variations in wafer backside emissivity due to
varying film composition.
"Philips Research is a strategic technology and design center for next-generation semiconductor devices," commented Dr.
Chris Gronet, general manager of Applied Materials' RTP division. "Having our system in this facility indicates Philips'
confidence in the capabilities of this product."
Philips Research Laboratories serve as a center of competence for Philips Semiconductors, the largest European
semiconductor manufacturer.
Applied Materials, Inc. is a Fortune 500 global growth company and the world's largest supplier of wafer fabrication systems
and services to the global semiconductor industry. Applied Materials is traded on the Nasdaq National Market under the
symbol "AMAT." Applied Materials' web site is appliedmaterials.com . |
