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To: Curlton Latts who wrote (8673)11/7/1997 1:45:00 PM
From: BillyG   of 25960
 
SVG installs Micrascan DUV system. Sorry if this was posted already.

A service of Semiconductor Business News, CMP Media Inc.
Story posted at 11:30 a.m. EST/8:30 a.m. PST, 11/7/97

SVG sets up Silicon Valley lab
for DUV photoresist development

SAN JOSE, Calif.--Silicon Valley Group Inc. here has installed its
Micrascan deep ultraviolet (DUV) step-and-scan lithography tool in the
company's PhotoProcess Division application lab for process development
supporting quarter-micron and below technologies.

SVG said the tool will enable photoresist development for next wafer
fabrication processes.

"Our primary goal for this new service is to provide chip makers with a
hands-on development facility for exploring complete DUV photolithography
solutions-ultimately contributing to their technical roadmaps and
time-to-market schedules," said Boris Lipkin, president of SVG's
PhotoProcess Division. The San Jose lab is intended to complement the
clustering capabilities in SVG Lithography Division's application lab in
Wilton, Conn.

The Micrascan tool will initially be clustered with SVG's 90-S photoresist
processing tool and will then be used with the company's new 200-APS -- a
next-generation system. The Micrascan DUV system is scheduled to be fully
operational in the first quarter next year.
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