PRI Automation Launches Advanced Process Control Application for Etch CD
Third in a Growing Suite of APC Solutions, WaferState APC for Etch CD Helps Increase Throughput for Semiconductor Manufacturers
BILLERICA, Mass., March 19 /PRNewswire-FirstCall/-- PRI Automation, Inc., (Nasdaq: PRIA, Toronto: PRJ), a global leader in semiconductor factory automation systems, software and services, today launched its third Advanced Process Control application. Part of PRI's growing suite of APC applications, WaferState(TM) APC for Etch CD (Chemical Deposition) is a run-to-run application that helps improve quality in CD processing areas. The software reduces CD variability by modeling etch-chamber age for more accurate model predictions, and then automatically adjusting CD process tools as necessary to keep results within a specified range. This helps semiconductor manufacturers improve quality, reduce re-work and improve throughput.
``Based on extensive work with PRI's customers in their fabs, we knew that typical weighted-moving-average control approaches weren't accurate enough for CD processes,'' said Tony Mullins, director of PRI's WaferState APC Business Practice. ``WaferState APC for Etch CD has the ability to estimate tool state and accommodate product/layer differences - a significantly more accurate method.''
WaferState APC is based on PRI's patent-pending control approaches using the FabRunner(TM) library of algorithms for advanced control. It is the first APC software that combines the proven reliability of distributed control systems in wide use in other chemical process industries with the critical knowledge and insight of semiconductor process and applications engineers, giving semiconductor manufacturers immediate access to proven applications on a proven platform.
All versions of WaferState APC feature graphical configuration, built-in control algorithms and pre-configured graphics for data visualization. They can be implemented in as little as two to three months, versus six to eight months for other APC solutions, enabling semiconductor manufacturers to reap the rewards of APC much faster than ever before.
PRI's other APC applications are WaferState APC for Litho Overlay and WaferState APC for Litho CD. For more information on PRI's APC products, call 1-800-999-9774, ext. 3083.
About PRI Automation
PRI Automation, Inc., headquartered in Billerica, Massachusetts, is a leading global supplier of advanced factory automation systems, software, and services that optimize the productivity of semiconductor and precision electronics manufacturers, as well as OEM process tool manufacturers. PRI is the only company to provide a tightly integrated and flexible hardware and software solution that optimizes the flow of products, data, materials and resources throughout the production chain. The company has thousands of systems installed at approximately one hundred locations throughout the world. For more information visit PRI online at pria.com.
Safe Harbor Statement
This release includes forward-looking statements, including, without limitation, statements relating to the expected benefits of PRI Automation products. These forward-looking statements are subject to risks and uncertainties that could cause actual results to differ materially from those expressed or implied by such statements. These risks and uncertainties include the following: the manner in which the customer uses our products and integrates them with third- party components may affect their performance; the downturn in the semiconductor capital equipment industry is harming our business; fluctuating demand for our products makes it difficult to manage our business efficiently; we have reduced our workforce in response to the industry downturn and reduced demand for our products and our smaller workforce may be inadequate to handle increased demand for our products; we may continue to experience delays and technical difficulties with new product introductions; 300mm technology, in which we have invested heavily, is being adopted more slowly than we expected, competition for early 300mm orders is intense and we have to date received few orders for 300mm automated handling systems; our lengthy sales cycle makes it difficult to anticipate revenues; our operating results fluctuate significantly in response to a variety of factors; delays in shipment or customer acceptance of a single significant order could substantially decrease our revenues for a period; the application of new accounting guidance under SAB 101 will result in delayed recognition of revenues from our factory automation systems; we typically charge a fixed price for our factory automation systems and therefore, we are vulnerable to cost overruns; we have a limited number of customers, we do not have long-term purchase agreements with our customers, and the loss, cancellation or delay of an order by any of these customers could harm our business; we must continually improve our technology and develop new products to remain competitive; demand for less expensive semiconductors is increasing pressure to reduce our prices; industry consolidation and outsourcing could reduce the number of available customers; our operations outside North America expose us to special risks of doing business internationally; our investments in the Asia-Pacific market may not be successful; we face significant competition from other automation companies; we are increasingly dependent on subcontractors and one or a few suppliers of certain components, subassemblies and manufacturing processes; the failure of our key suppliers to deliver components on time could harm our business; we depend on our executive officers and other key personnel; our software products may contain defects that could result in claims and harm our business; we may be unable to protect our proprietary technology; others might claim that we infringe their technology; rising energy costs may increase our operating expenses; future acquisitions may disrupt the Company's operations; we are subject to pending class action securities litigation that could be costly to defend, divert the attention of our management and, if determined adversely to us, seriously harm our business; and other factors identified in our registration statement on Form S-3, file number 333-60180, filed with the SEC on May 3, 2000 and in the preliminary joint proxy statement/prospectus relating to Brooks Automation's proposed acquisition of PRI Automation included in the registration statement on Form S-4, file number 333-74590, filed with the SEC on December 19, 2001. We assume no obligation to update any forward-looking statements included in this release.
WaferState is a trademark of PRI Automation, Inc. All other trademarks contained herein are the property of their respective owners.
SOURCE: PRI Automation, Inc. |
