JMAR To Acquire SAL Inc., Leading Semiconductor X-Ray Lithography System Supplier
SAN DIEGO--(BUSINESS WIRE)--April 17, 2001--JMAR Technologies Inc.
*Acquisition Will Give JMAR Capability to Produce Complete, Advanced XRL Systems Powered by its Novel
Compact X-ray Sources
*Move Addresses Critical Industry Need for Cost-Effective Alternative to EUV for Next Generation Lithography (NGL)
*Systems Will Initially be Used to Make Gallium Arsenide Microcircuits for Wireless and Broadband Communications
JMAR Technologies Inc. (Nasdaq:JMAR - news), a provider of precision micro- and nanotechnology products, today announced that it has signed a letter of intent to acquire Vermont-based Semiconductor Advanced Lithography Inc. (SAL), the world's most experienced provider of X-ray lithography (XRL) stepper systems.
SAL's XRL systems have already demonstrated the ability to image sub-100 nanometer (nm) circuit patterns. By integrating JMAR's leading-edge laser plasma X-ray sources with SAL's X-ray steppers and other supporting technologies, JMAR expects the new JMAR/SAL lithography unit to be created by this acquisition will offer manufacturers of high-speed gallium arsenide (GaAs) semiconductors an XRL processing capability before the end of 2002. The new JMAR/SAL unit also expects to provide more affordable sub-0.13 micron silicon chip processing on an earlier timescale than currently projected for alternative developmental technologies, such as extreme ultraviolet, or ``EUV.''
The market for semiconductor lithography equipment is several billion dollars per year. JMAR estimates that the new integrated JMAR/SAL XRL systems will sell from $6 million to $10 million each, depending on the system's configuration and level of performance. That compares with estimates ranging as high as $40 million each for competing EUV systems currently in development.
The acquisition is subject to the completion of due diligence by both parties with the purchase consideration comprised of an undisclosed amount of JMAR shares, plus a promissory note, and cash.
``Prior to the advent of JMAR's patented, highly-efficient PXS laser plasma X-ray source technology, XRL had failed to gain market acceptance due to a lack of adequate or acceptable X-ray source performance characteristics,'' noted John S. Martinez, Ph.D., JMAR's chairman and CEO. ``We believe that JMAR's PXS technology successfully overcomes those shortcomings.''
Commenting on the transaction, Daniel J. Fleming, Ph.D., president and CEO of SAL Inc. said, ``SAL and its predecessor organization, Karl Suss of Germany, have built and installed 16 XRL systems, worldwide, more than all other X-ray stepper manufacturers combined. SAL is convinced that XRL provides a simpler, more affordable NGL solution. We look forward with enthusiasm to joining the JMAR organization, which we believe is committed to implementing the commercialization of point-source XRL for the semiconductor industry.''
JMAR's XRL technology offers several potential advantages when compared with other lithography methods. Among the foremost of these is the existing proximity mask technology, which enables the use of relatively inexpensive collimators to intensify and direct the short wavelength X-rays onto mask/wafer targets without the need for the extremely complex and expensive focusing optics that have become inbred in all types of advanced optical lithography techniques, including Deep Ultra Violet (DUV) and EUV. Furthermore, the intrinsic nature of collimated X-ray light enables lithographers to readily manufacture certain critical high performance circuit features that otherwise are very difficult, or impossible, to make with current or envisioned future optical lithography systems.
By implementing already identified and achievable technology upgrades, JMAR's integrated X-ray source/stepper technology has the potential to increase the production throughput of sub-0.13 micron semiconductor circuits by an additional 20 to 50 times.
``SAL brings to JMAR a wealth of experience in the lithography engineering and technology arenas,'' Dr. Martinez explained. ``By combining that talent with JMAR's world-class advanced light technology we intend to position JMAR/SAL as the world's premier provider of high-performance next generation lithography systems for both the silicon and the compound semiconductor industries.''
Further information about this transaction is available on JMAR's Web site at www.jmar.com.
JMAR Technologies Inc., a semiconductor industry-focused company, is a leading developer of proprietary advanced light sources for high-value microelectronics manufacturing and metrology. It is also a fabless provider of high performance integrated circuits for the rapidly growing broadband telecommunications market and other microelectronics applications. In addition, JMAR manufactures precision measurement, positioning and light-based manufacturing systems for inspection and repair of semiconductors and continues to play an important role in adapting its precision semiconductor manufacturing technology to the fabrication of advanced biomedical and optical communications products.
The statements regarding JMAR's expectations for the successful development and introduction of new X-ray and other advanced light products and future sales and potential business opportunities are forward-looking statements that are subject to risks and uncertainties that could cause actual results to differ materially from those set forth in the forward-looking statements.
These risks include the failure of future orders to materialize as expected, delays in shipment or cancellation of orders, failure of acceptance of new products or technology, and the other risks detailed in the company's reports filed with the SEC. The company's successful pursuit of its opportunities in X-ray lithography are subject to the risk that the EUV LLC is successful in developing an acceptable next generation lithography process that becomes the process of choice for the entire industry or that the semiconductor industry fails to adopt XRL as a Next Generation Lithography alternative.
Contact:
JMAR Technologies Inc., San Diego
Dennis E. Valentine, 760/602-3292
jmar.com |
