Asyst Wafer Transfer Robot Selected by Canon for Advanced 200/300mm Step-and-Scan Lithography Tools
Leading Lithography Company's First-ever Robotics Outsource Constitutes Major Asyst Design Win
FREMONT, Calif.--(BUSINESS WIRE)--July 31, 2002-- Asyst Technologies, Inc. (Nasdaq:ASYT - News), a leading provider of integrated automation solutions that maximize semiconductor manufacturing productivity, today announced that Canon, Inc. has selected Asyst's Japanese-designed and manufactured UTX-F5500C single-arm wafer-transfer robot, with linear track, for incorporation into Canon's newest advanced step-and-scan lithography systems for 248-, 193-, and 157nm wavelengths.
An Asyst customer for more than five years, Canon chose the Asyst robots based on the products' advanced features and performance, as well as the high level of customer support and integration services provided by Asyst throughout the evaluation process.
"As we work toward bringing our newest scanners to production, we are acutely aware of our customers' performance requirements," said Hirofumi Sato, manager, Semiconductor Production Equipment Business Planning Division, for Canon. "Optimizing the optical capabilities of these systems is our highest priority, making outsourcing the robotics to a proven domestic supplier an important strategy to help bring these systems to market as quickly as possible. The demonstrated throughput and productivity advantages of Asyst's UTX-F5500C robots, and the team's willingness to collaborate, greatly simplified our choice."
The Asyst UTX-F5500C incorporates high-speed AC motors and harmonic gear reduction to ensure smooth performance and high reliability in a production setting. As an option, the robot can be mounted on a linear track of various lengths. The robot also is available in a dual-arm configuration.
Asyst reports that Canon already has ordered nearly two dozen of the robots, which have begun shipping.
About Asyst: Asyst Technologies, Inc. is a leading provider of integrated automation solutions that enable semiconductor manufacturers to increase manufacturing productivity and protect investments in silicon wafers during the manufacture of integrated circuits, or ICs. The company offers a broad range of 200mm and 300mm solutions that enable the safe transfer of wafers and information between process equipment and the fab line throughout the IC fabrication process, while reducing IC damage caused by human, environmental, mechanical and chemical factors. Encompassing isolation systems, work-in-process materials management, substrate-handling robotics, automated transport and loading systems, and connectivity automation software, Asyst's modular, interoperable solutions allow chipmakers and original equipment manufacturers, or OEMs, to select and employ the value-assured, hands-off manufacturing capabilities that best suit their needs. Asyst's homepage is asyst.com
Except for statements of historical fact, the statements in this press release are forward-looking. Such statements are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include, but are not limited to, general economic conditions, semiconductor industry cycles, risks associated with the acceptance of new products and product capabilities and other factors more fully detailed in the Company's most recent 10-K and 10-Q reports on file with the Securities and Exchange Commission. |
