Silicon Valley Group Message Board

STOCKTALK

We've detected that you're using an ad content blocking browser plug-in or feature. Ads provide a critical source of revenue to the continued operation of Silicon Investor. We ask that you disable ad blocking while on Silicon Investor in the best interests of our community. If you are not using an ad blocker but are still receiving this message, make sure your browser's tracking protection is set to the 'standard' level.

Technology Stocks : Silicon Valley Group

Public Reply Prvt Reply Mark as Last Read File

Previous 10 Next 10 Previous Next

To: Nathan Brown who wrote (447)	5/10/1997 4:01:00 AM
From: Ritz	of 2946

Nathan: The problem you noted as to the lack of transparent materials at wavelengths of .15 microns and below is well known. There are several technologies, optical (EUV), x-ray, E-beam and Ion beam, competing to become the choice for lithography at .13 microns and below. If indeed optical lithography is to continue to reign supreme (as most believe it will) someone will need to develop an all-reflective optics stepper. This is one of the many reasons I am positive on SVGI's outlook. SVGI clearly leads all stepper makers in incorporating reflective optics. The Micrascan series uses a catadioptric reduction lens, which uses both reflective and refractive optics. No other steppers, to my knowledge, incorporate reflective optics to any siginificant degree. In fact, I believe that it is because of the catadioptric lens, and the superior light transmission it provides, that SVGI was able to use an Hg lamp for .25 micron lithography in its Micrascan II+. To my knowledge all of its competitors have had to resort to Cymer's excimer laser source exclusively. There is an excellent article detailing this difference between SVGI's reduction optics and those of its competitors, in the March 1997 issue of Solid-State Technology. -Ritz

Report TOU Violation

Share This Post

Public Reply Prvt Reply Mark as Last Read File

Previous 10 Next 10 Previous Next