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To: X-Ray Man who wrote (4481)8/25/1997 9:48:00 AM
From: Bill Jackson   of 213177
 
X-Ray (lithography) Man. Thanks for the update. I remember reading about the huge costs of the new fine line fabs, so high that users collaborate on their construction. You are right about the new paradigm, they are all talking about X-Ray and ion beam tech in the mags now. Big problems to make it work. AS you get to 0.08 and beyond even electron crowding becomes a problem, as the electron density in the fine line exceeds a certain level and carves the line line water in a creek.
We may be close to the end of that famous doubling law(whos names eludes me)
Bill
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