Some more detail on this contract can be found here:
defenselink.mil
Looks like this is an add on to last years Sanders contract which involved the dense plasma source from Science Research Laboratory.
Sanders, A Lockheed Martin Co., Microwave Electronics Div., Nashua, N.H., is being awarded a $12,296,436 modification for previously awarded contract
N00019-97-C-2001 to exercise an option for the design, development, and demonstration of an X-Ray Stepper, X-Ray point source, and beamline interface
design capable of connecting the stepper and source to form a point source lithography system. Work will be performed in Waterbury, Vt. (51%), Somerville,
Mass. (27%), Nashua, N.H. (17%), and Madison, Wis. (5%), and is expected to be completed in April 2000. Contract funds will not expire at the end of the fiscal
year. The Naval Air Systems Command, Patuxent River, Md., is the contracting activity.
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