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Technology Stocks : Cymer (CYMI)
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To: Dowjoe who wrote (5021)10/13/1997 8:01:00 PM
From: Bookdon   of 25960
 
These masks (or "reticles") are "stencils" of the pattern to be put on the wafer. They are similar to the masks you refer to in that they are formed by etching this pattern on a glass plate that is coated with Chromium. A photo-resist material (like the film in a camera) is put over the Chromium and the pattern is exposed, using an electron beam, or programmed laser beam. Where the photo-resist is exposed, the resist becomes "soluble" in a developing solution, and is washed away, leaving bare Chromium. This is etched away, using an acid solution or a plasma etcher (like those made by Plasma Therm), leaving the pattern "clear" in a plate otherwise covered with a mirror-like Chromium. Light from a stepper passes trough the clear area to expose a resist material on a Silicon wafer, and transfers that pattern to the wafer surface.
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