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Technology Stocks : Cymer (CYMI)

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To: Ian@SI who wrote (5229)	10/15/1997 9:47:00 PM
From: IRA ZOHN	of 25960

FYI Posted from SI from another investor I just got back from Semicon Southwest in Austin just to check out how CYMI is doing. I talked to all the stepper makers and the laser makers and here is what I found out: 1) Nikon is only shipping CYMI lasers on their steppers. When I asked about Lambda Physics, they said it is not part of the system but can put it on at your request. 2) SVGI? They are in bed with CYMI. 3) ASMLF? They also are in bed with CYMI. 4) Cannon? They are shipping their steppers with CYMI lasers. I asked about the LP lasers and they said the spec. doesn't meet their requirement. They also evaluated Komatsu but unhappy with the results. They said if LP and Komatsu come out with a better laser they would consider testing it. They said CYMI laser is the best to date. 5) Integrated Solution? I couldn't find their booth. 6) CYMI? Nice booth and very knowledgeable people. They just increased their capacity to 75 lasers/month and will increase more by year end. They are ramping up in their service and was considering giving me a job! They got their experimental 193nm laser up and running in their lab for a few months already. Average output output power about 5W with efficiency 1.5% compared to 3% for KrF. They are working in narrowing the line width and improve in their solid state power to the laser. 7) Lambda Physics? These guys are interesting. They also have a nice booth. They have a 254nm lasers but wouldn't tell me which steppers are using them. But they did say that they are the 2nd SOURCE to all the steppers except Cannon. They said Cannon is non-LP. I suspect that all the stepper makers line LP up in case if CYMI doesn't deliver. LP said that the 248nm is CYMI's market and they are curently pursuing the 193nm. They said they have a 193nm and would like to sell me one. I told them I don't have the stepper with lenses for that technology. 8) Komatsu? Couldn't find their booth. Well so far so good. CYMI will dominate the 248nm. At 193nm the overlay resolution required is about 40nm. Most steppers I saw have resolution overlay of 50nm, not good enough. They will have to improve on the stage for the 193nm and the lenses. They told me it would be late 1998 at the earliest. Maxwel

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