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Technology Stocks : Intel Corporation (INTC)
INTC 36.26+0.3%1:16 PM EST

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To: Paul Engel who wrote (57402)6/6/1998 10:06:00 PM
From: Paul Engel   of 186894
 
Intel Investors - The First Glimpse of Intel's Copper Technology

Intel and Applied Materials are jointly presenting a paper on Copper Metallization technology.

techweb.com

Here are some excerpts:

"Intel has kept its work under the tightest wraps-and it may be broader-based than any other company's. A powerful hint comes
from a paper Intel-and engineers from Applied Materials Inc.-was to
deliver at last week's IEEE interconnect-technology conference.


The paper focuses on research to determine whether a
conventional, subtractive-etch process can lay down copper
interconnects. For now, Damascene dominates, since it's the only
way to create the necessary thick, barrel-shaped copper structures.

Most experts don't put much stock in etch for copper interconnects.
Torturously slow etch rates have been a big problem. Surprisingly,
the Intel-Applied paper sees progress. "Copper-etch rates at
greater than 5,000 [angstroms per minute] have been achieved, and
post corrosion-free copper-etch performance has been
demonstrated for times in excess of 72 hours," the paper's abstract
notes."

Paul

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