Semi, I once toured a factory in Japan that made tuners....
--Sounds cool....
Is this how they work at Dresden? Since with the pods any production can be routed around any error machine? or are there considerationns, like vaccuum continuity that do not permit this? Are the pods capable of a vacuum in transit, so they leave a process under cavuum and enter another also under vacuum through vacuum locks with pumpdown? I speculate, since dust will settle in a vacuum pod and will stay suspended in a gas filled pod.
Bill
-- How things work in Dresden is beyond me, (I'm with the "other guys" remember?). Sometimes you can use other tools to take up the slack of a down tool, sometimes you can't. Those considerations would certainly be company confidential, so sorry, I can't elaborate.
-- I would guess that a Vacuum POD system would be prohibitively expensive. Plus, it's not normally needed, since the fabs that use it are all State Of The Art Cleanliness at Class 1 (Maximum 1 particle of dirt, no larger than 1 micron, in 1 cubic foot of air). So vacuum transport is probably of little additional value, considering the additional cost, and relative cleanliness of the fab already.
:-)
Semi
P.S. - Litho Puke was a term I coined when I went over to Etch. The Litho guys I worked with started referring to me as "That Etch Traitor", so I said. "I'd rather be a Traitor than remain a Litho Puke". Childish, I know, but I couldn't help myself.
:-) |
