Rudolph Technologies(RTEC)....Rudolph Announces Multi-Million Dollar Order for
MetaPULSE(R) Copper Metrology Tools
FLANDERS, NJ, Feb. 24, 2000 (PRIMEZONE) -- Rudolph Technologies, Inc. (Nasdaq:RTEC) today announced a
multi-million dollar, multiple tool order from a repeat customer for the Company's industry-leading line of copper film
measurement tools. The customer will use the tools in production in both the thin films and chemical mechanical polishing
(CMP) areas of a logic chip facility in Europe. The tools are scheduled for shipment in the second and third quarters of this
year.
Rudolph's MetaPULSE family of copper tools simultaneously measures five or more metal layers on 200 mm and 300 mm
product wafers. The exclusive technology uses a non-contact, non-destructive measurement technique based on laser-induced
ultrasound. This enables semiconductor manufacturers to improve their yields and control the process challenges of copper
metallization. The Company also has developed a family of MetaPULSE aluminum tools.
With this announcement, the Company's sales and orders of MetaPULSE tools, which are priced between $900,000 and
$1,600,000, now total more than 50. Since launching production of the tool family in 1998, the Company has completed
delivery of multiple tools in North America, Europe, and Asia.
''In just four months as a public company, Rudolph's order visibility for MetaPULSE tools has improved dramatically, from
about one quarter to in excess of two quarters,'' said Paul F. McLaughlin, Rudolph's Chairman and Chief Executive Officer.
''This clearly demonstrates Rudolph's success in anticipating the emerging trend toward copper and remaining ahead of the
curve as semiconductor manufacturers' needs evolve. We are very pleased with our market penetration to date and believe we
are strongly positioned for continued growth on all three continents where our customers have operations.''
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