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Technology Stocks : Semi Equipment Analysis
SOXX 312.76+1.1%Dec 8 4:00 PM EST

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To: Donald Wennerstrom who wrote (929)8/6/2001 10:53:43 AM
From: The Ox   of 95536
 
semiconductor-intl.com

The escalating cost of wafer fabs has made the capital productivity of
tools in existing fabs, and especially new 300 mm fabs, a critical issue.
Between 1997 and 1999, industry participants estimated the capital cost
of 300 mm microelectronic manufacturing plants to be in the range of
$1.3B-$1.6B.1,2 Today, the actual cost of 300 mm plants being built is
closer to $3B-$4B,3 with manufacturing equipment accounting for
70-80%.1

The imperative for maximizing tool productivity and shrinking device
tolerances has made typical approaches to manufacturing control much
more expensive than they were previously. For example, engineers commonly develop process
recipes that minimize process sensitivity to recipe variable perturbations. This approach minimizes the
impact of drift or step change in recipe variable control. Although effective, the cost of tool time for
the necessary experiments makes this passive control approach to solving process control problems
cost-prohibitive............
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