It is alive! See below! (SVGI stock price is dull however!)
Tuesday June 8, 3:00 pm Eastern Time
Company Press Release
Silicon Valley Group Unveils ProCell - A Vital Partner in Lithography Cluster Productivity
SAN JOSE, Calif.--(BUSINESS WIRE)--June 8, 1999--
Product Launch Offers Extendibility Down to 50 nm Node
with Industry's First Hexagonal Coat/Develop System Design
and Patented Scheduler Enabling Lithography Process To Be
Completed In 12 Perfectly Balanced Moves
Silicon Valley Group (Nasdaq: SVGI - news) today unveiled its innovative ProCell(TM) DUV Coat/Develop cluster system for both 200 and 300 mm wafers. This hexagonal cluster platform and patented synchronous scheduling will significantly improve process consistency at 250 nm and beyond. This system is seen as a major breakthrough for chipmakers worldwide since it addresses many of the bottlenecks commonly associated with traditional linear tracks. The ProCell Coat/Develop cluster completes the lithography process in 12 perfectly balanced moves -- the minimum number possible.
Until now, lithography track systems had been based upon a linear design developed for I-Line processing that has wafers moving from one process step to another on a linear track. Inherent in these conventional linear designs are system-induced delays and complicated wafer handling movements that contribute to inconsistent process results and that negatively impact critical dimension performance.
According to Boris Lipkin, president of SVG's Track Systems Division, ''Our ProCell product delivers consistent quality process results needed to match capabilities of leading steppers/scanners with throughput to match. Furthermore, this standard platform addresses both the 200 mm market and the 300 mm transition.''
Overcoming traditional industry bottlenecks, ProCell takes full advantage of a revolutionary platform design, allowing the processing of more than 40 wafers simultaneously with varying position, time requirements and sequencing. A patented synchronous scheduling algorithm called Advanced Guidance System(TM) (AGS(TM)) optimizes wafer movement by calculating the optimal wafer path before movement is initiated, resulting in the transport of each wafer at the precise moment necessary for consistent process results.
Commenting on the synergy between ProCell's form and AGS' function, SVG chairman and CEO Papken Der Torossian noted, ''Innovative design fosters innovative execution. Our design team has come through with winning system architecture and implementation solutions that help our customers win the productivity race. This development represents another step in leveraging and advancing our multi-product focus worldwide. We are delighted with this major product introduction from our Track Systems Division that addresses a vital profitability factor in chip manufacturing.''
ProCell's close-packed hexagonal cell structure, three-axis system and bidirectional thermal modules enabled its simple robotics design. ''The core technology exploits the built-in flexibility of the platform design by relaxing demands on robot speed, thereby avoiding unnecessary moves and the need for extra robots required by conventional track systems,'' said Lipkin. ''AGS eliminates random, system-induced delays using critical time management that automatically builds in scheduled intervals at user-defined non-critical steps allowing consistent process timing -- within each wafer, from wafer to wafer and from cassette to cassette.''
Silicon Valley Group (Nasdaq: SVGI - news) is a leading manufacturer of automated wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor chip manufacturing. Its products include photolithography exposure tools; photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; and precision optical components and systems. For more information, visit www.svg.com.
Forward-looking Statement Disclaimer: The matters discussed in this news release, and in particular statements made by the Company's Chairman and CEO and the President of the Track Systems Division, include forward-looking statements that involve risks and uncertainties including but not limited to difficulties encountered or the benefits derived from customers using the ProCell System. For a complete review of the risks facing the Company, including economic conditions, industry conditions, trade environment and other risks, reference is made to the Company's filings with the Securities and Exchange Commission. Particular reference is made to the Company's most recent Forms 10K and 10Q, which detail such risk factors.
Contact:
Silicon Valley Group Inc.
Werner Rust, 408/467-5949
E-mail: rustw@svg.com
or
Silicon Valley Group Inc.
Nancy Szymanski, 408/467-5870 (Investor Relations)
E-mail: szymansn@svg.com
or
Mathews & Clark
Stewart Chalmers, 408/736-1120
Email:schalmers@mathewsandclark.com
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