EpiWorks, Inc. homepage
epiworks.tech.com
Founded - 1997. From the Management bios page:
Gregory E. Stillman, Ph.D., President
Dr. Stillman, Chief Scientist, has been a professor at the University of Illinois at Urbana-Champaign since 1972 and is a world renowned researcher in the fields of compound semiconductor materials, devices, and characterization. During his tenure, Dr. Stillman developed several practical technologies that have been adopted by industry, such as extrinsic carbon-doping by MOCVD. He holds two U.S. patents and three patents pending on techniques related to the growth of compound semiconductors and the fabrication and design of high-performance transistors...
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Stillman's patents:
U.S. #5,656,538 "Halide dopant process for producing semi-insulating group III-V regions for semiconductor devices", issued 08/12/97. {carbon doping, esp. of InP}
patents.ibm.com
U.S. #5,580,382 "Process for forming silicon doped group III-V semiconductors with silicon tetrabromide", issued 12/03/96. {silicon doping}
patents.ibm.com |
