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Technology Stocks : Dupont Photomasks (DPMI)
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To: Ira Player who wrote (854)6/10/1999 9:01:00 AM
From: Katherine Derbyshire  Read Replies (2) of 955
 
>>I believe the issue is with computation efficiency.<<

Not exactly. PSM works because of constructive interference between features: I can print feature A below the wavelength of light because of diffraction edges from the neighboring feature B. Repetitive patterns are more likely to offer "useful" interference patterns than non-repetitive ones.

The increased cost of PSMs is mostly due to the sheer size of the database used to write the mask, rather than the computation cost of creating that database. Defect specifications for PSM masks are much more stringent, which puts pressure on yield and makes inspection more time consuming and costly.

Katherine
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