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Politics : Formerly About Advanced Micro Devices
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To: Petz who wrote (62018)6/16/1999 7:19:00 PM
From: Shane Geary  Read Replies (2) of 1584213
 
Petz - Re: " But how is a chip made with varying oxide thickness over its real estate."

As Kash said, in some circles it's pretty standard to have dual gate oxides on a single wafer. Eg if you want 3.3V and 5V transistors on the one chip.

One way to do it...

Say you want 35A and 75A Tox. Grow most of your thick gate ox (about 65A at a guess) over all device regions. Mask the areas where you want to keep the thick oxide and strip away the rest.

Then grow 35A of oxide. The 65A will grow to 75A. Hey presto - dual gate oxide.
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