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Technology Stocks : Dupont Photomasks (DPMI)
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To: Carl R. who wrote (871)6/18/1999 9:30:00 AM
From: Katherine Derbyshire  Read Replies (1) of 955
 
IMO, it will remain a specialty tool, though the niche will probably expand. AFMs are somewhat difficult to calibrate, and the calibration isn't necessarily going to be all that stable. You can insert a calibration step before each measurement in the lab, but clearly don't want to do that if you're trying to get manufacturing throughput. (In all fairness, Veeco has worked hard on precisely this issue, but the fundamental physics are just not on their side.)

IMO, the big winners for sub-0.15 micron will be closed-loop process control and in-situ monitoring. These are basically the semiconductor incarnations of Baldridge's dictum to build quality in rather than inspect defects out. There are tons of small (often privately held) hardware and software companies in this space, but none really stands out as a clear leader right now.

Katherine
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