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To: Johnnie W. who wrote (14770)3/20/1997 12:27:00 AM
From: Monica Detwiler   of 186894
 
Johnnie W - "Layered Deposition"

Please tell us a little more about this, Johnnie. Six layers sounds like a rather small number, don't you think?

Especially since 5 of them are metal - and one is TiN or W local interconnect.

What about polysilicon, gate oxides, field oxides, TiN, Tungsten plugs, Inter-level oxides, etc.?

Perhaps there are just a wee bit more than 6 layers, Johnnie W.

monica
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