Komatsu deep-UV laser doubles life expectancy to 10 billion pulses
A service of Semiconductor Business News, CMP Media Inc.
Story posted 11:15 a.m. EST/8:15 a.m., PST, 7/21/99
TOKYO -- Komatsu Ltd. here has announced a high-throughput, deep-ultraviolet excimer laser source can double the life expectancy of the light chamber to 10 billion pulses, the longest in the industry, according to the company.
Komatsu said it accomplished this with a newly designed electric circuit and gas flow system for arc-free discharge.
This feature will substantially lower the cost of ownership for semiconductor customers, because the high cost of running DUV light sources has been a growing concern for end users. Komatsu said the new G20K laser source has been demonstrated to provide 99.6% uptime. The system's modular design also makes preventive maintenance easier, as components can be removed from the front end.
The G20K has a 14% smaller footprint, and the solid-state pulsed-power module consumes 20% less power.
The Japanese semiconductor equipment maker also announced the opening of a new training center in Hillsboro, Ore. The cleanroom demonstration facility will open in 2000, Komatsu said.
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