Tegal Files Patent Infringement Suit Against Lam Research
[Well alright, a patent infringement suit. The home team must be doing something right! --Duker]
ALEXANDRIA, Va. (Dow Jones)--Tegal Corp. (TGAL) filed a patent infringement suit in U.S. District Court, Eastern District of Virginia, against Lam Research Corp. (LRCX).
In a press release Thursday, Tegal said the suit alleges that Lam deliberately infringed two Tegal patents in developing its Exelan system.
Officials for Lam, based in Fremont, Calif., were not immediately available for comment.
The patents cover Tegal's dual-frequency triode method for plasma etching and Tegal's dual-frequency diode plasma apparatus, Tegal said.
Tegal, a Petaluma, Calif., maker of plasma-etch systems, said the suit seeks treble damages, attorney fees and other costs.
Tegal said the court awarded it attorney fees and costs and enjoined Lam, a semiconductor maker, from further infringement of one of the two patents.
-Dave Copeland; 201-938-5400 |
