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Politics : Formerly About Advanced Micro Devices
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To: Paul Engel who wrote (79978)11/15/1999 10:19:00 PM
From: Zoran  Read Replies (2) of 1579697
 
Paul,

Manufacturability is a relative term. If a company A can measure only the top of a poly gate, while the bottom can be up to 30 nm shorter due to the notched gate, and a company B uses the same metrology tool to measure gate CDs, then I'll claim that company A will have more difficult time to control critical dimensions, therefore making their technology less manufacturable. Whenever you cannot control one of the major factors of the process variations in real time (cross section SEM's are destructive), your technology becomes inherently unmanufacturable. This doesn't mean that Intel's engineers are not going to do a good job at minimizing those variations but their job is more difficult to start with. If the gate will have to shrink in order to achieve greater speeds then this problem will be exacerbated.

Zoran
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