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To: Ian@SI who wrote (23815)12/20/1999 12:41:00 AM
From: Mani1  Read Replies (1) of 25960
 
Ian Re <<Is there a single production stepper or scanner anywhere in the world that can process 300mm wafers?>>

I think so. Both Canon and Nikon have been advertising their new steppers as 300 mm capable. Litho is not the main challenge in 300 mm. The stepper has to "step" through the wafer regardless of how big it is. The CVD, CMP and etching has to be done all at once so the old equipment who's foot print is only 200 mm will no longer work.

I do not think current steppers need new light sources to be modified to 300 mm.

Mani
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