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To: nasdaqian who wrote (223)6/11/1996 12:10:00 PM
From: Max Vasquez   of 362
 
Sorry if I gave the impression that all or even most of Tencor's machines may be classified as back-end. According to diagrams in the 95 Tencor annual report (AR95), their machines can be used to qualify new fab processes, as you state, as well as to monitor wafer processing "in line"

One interesting emerging application that I did not appreciate initially is to monitor planarity in CMP; AR95 mentions this as a rapidly expanding market for Tencor machines. This probably is not an issue for 64M memory chips but may become important for much higher density memory ICs or, of course, for complex logic chips like Pentium, PowerPC, DECalpha, etc.
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