Applied to calibrate process simulation software to its tools
Semiconductor Business News
(01/04/00, 10:34:46 AM EDT)
SANTA CLARA, Calif.--In a move to calibrate process and device simulation software to specific production tools, Applied Materials Inc. today announced a partnership with Integrated Systems Engineering AG, a six-year-old Swiss supplier of technology computer-aided design (TCAD) programs for chip manufacturing.
"Tool-specific TCAD capability has tremendous potential for improving process results in advanceddevices," said Israel Beinglass, managing director and chief technologist for Applied Materials' Transistor and Capacitor Business Group. "Teaming with a leading TCAD supplier, like ISE, gives Applied Materials a unique opportunity to increase the value of our systems to customers," he added.
Santa Clara-based Applied expects to save chip makers money and accelerate the shipment of new ICs to the marketplace by improving the ability to accurately model device performance from specific tools, Beinglass said. Improvements in TCAD software can also reduce the need for test wafers in fabs, said Applied Materials.
TCAD software is used by process engineers to model and characterize results from semiconductor equipment and fabrication steps. Applied said engineers can use tool-calibrated software to better understand the sensitivity of various process parameters and quickly optimize equipment operation.
Applied said it will offer the ISE TCAD software as an option for its ion implant and rapid-thermal processing (RTP) systems. In these process steps, small changes in parameters, such as tilt angle or ion-beam energy in implant or temperatures in RTP, can have a major impact on how a semiconductor device performs, according to Applied.
When fully developed, the calibrated TCAD software will be available for integration into wafer fabs from both Applied and Zurich-based ISE.
"This collaboration gives us a base for constantly improving our product to meet fast-changing, real-world process challenges," said Wolfgang Fichtner, chief executive officer of privately-held ISE.
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