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Politics : Formerly About Advanced Micro Devices

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To: Duncan Baird who wrote ()1/30/2000 1:42:00 AM
From: Hans de Vries  Read Replies (1) of 1582939
 
Photographs of the (pre-) Copper Athlon process.

This article is about how Motorola (in Austin, Texas) managed to get the effective gate length to (sub) 100 nm while using DUV scanners with KrF lasers with a 258 nm wavelength. These tricks are now used for the copper Athlon as well.

semiconductor-intl.com

Hans.
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