PRI Selected By Varian Semiconductor To Supply 300mm Integrated Front-End Buffering Solutions
- Ion Implant Maker Will Sole Source Innovative Solution to Meet Critical Throughput Requirements in Next Generation Tools -
BILLERICA, Mass., Feb. 10 /PRNewswire/ -- PRI Automation, Inc. (Nasdaq: PRIA - news), the global leader in semiconductor factory automation, today announced that it has been selected by Varian Semiconductor Equipment Associates, Inc. (Nasdaq: VSEA - news) to supply 300mm integrated front-end buffering systems for Varian Semiconductor's next generation VIISta(TM) ion implantation equipment. The new 300mm integrated front-end buffering system provides a continuous supply of work-in-process wafers to support the high throughput rates of Varian Semiconductor's VIISta equipment. It also serves as an integration point between the ion implant tool and the intrabay factory automation systems that will be installed in 300mm fabs.
''Our next generation VIISta equipment delivers breakthrough performance in terms of throughput and tool utilization,'' said Walt Sullivan, vice president, customer operations and CIO, Varian Semiconductor Equipment Associates, Inc. ''We need a supplier who understands the needs of OEM equipment manufacturers and has the proven industry leadership to deliver a solution that fits our cost of ownership model. PRI meets both of these requirements and we are very happy to be working with them on this important project.''
''Tool utilization and throughput are critical to achieving the productivity levels required in 300mm fabs,'' said Ed Wagner, vice president and general manager of PRI's OEM Systems Division. ''Tool buffering solutions will become a critical component of a semiconductor manufacturer's WIP management strategy to maximize factory productivity. Our 300mm integrated front-end buffering system incorporates our leadership atmospheric wafer- handling components and provides a robust work-in-process buffering solution that ensures a steady supply of wafers are available when they are needed by the tool. We are very pleased to be chosen by Varian Semiconductor and look forward to a successful partnership together.''
As the industry moves to 300mm manufacturing, integrated front-end systems will benefit both semiconductor manufacturers and OEM tool suppliers. For chip-makers, the steady supply of wafers at the front-end of the tool ensures high tool throughput. And, because integrated front-end systems seamlessly integrate with the intrabay automation systems, processed wafers will be quickly transported to the next process tool helping to create the highly productive manufacturing environment required by next generation fabs. Lastly, manufacturers have a single point of contact for servicing both the front-end system and other automation systems installed throughout the fab. For OEM equipment suppliers, PRI has taken the responsibility for integrating all the system components of the front-end system with the process tool and complying with all SEMI standards. This will reduce the OEM's time-to-market and allow them to focus on their core competency of developing next generation process technology improvements.
The integrated front-end system is a modular, ultra clean, buffering platform that includes up to four wafer loadports integrated with an enclosed mini-environment consisting of an atmospheric wafer-handling robot with track, a wafer pre-aligner and a controller. The system is designed to handle up to 250 wafers per hour and is ideally suited for high throughput tools. The system can be used to load in-line process modules or a vacuum cluster platform such as PRI's VCP vacuum cluster platform and conforms to all SEMI, I300I, S2-93, and CE requirements. 200mm SMIF and open cassette interfaces are also supported making the integrated front-end system a bridge tool that will aid in the transition to 300mm manufacturing.
About Varian Semiconductor
Varian Semiconductor Equipment Associates, Inc. (VSEA) is the industry leader in designing, manufacturing, marketing and servicing ion implantation systems, semiconductor processing equipment used in the fabrication of integrated circuits. Through the process and productivity advantages of single wafer technology, VSEA is providing chipmakers with high throughput, low-cost and maximum yields. The company is based in Gloucester, Massachusetts and maintains offices around the world. Its stock is traded on the Nasdaq National Market under the symbol ''VSEA''. Additional information and background is available on VSEA's Website www.vsea.com.
About PRI Automation
PRI Automation, Inc., headquartered in Billerica, Massachusetts, is the leading global supplier of advanced factory automation systems and software that optimize the productivity of semiconductor and precision electronics manufacturers as well as OEM process tool manufacturers. PRI is the only company to provide a tightly integrated and flexible hardware and software solution that optimizes the flow of products, data, materials and resources throughout the production chain. The company has thousands of systems installed at approximately one hundred locations throughout the world. For more information visit PRI online at www.pria.com.
VIISta is a trademark of Varian Semiconductor Equipment Associates, Inc.
SOURCE: PRI Automation, Inc.
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