Formerly About Advanced Micro Devices Message Board

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Politics : Formerly About Advanced Micro Devices

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To: Process Boy who wrote (93443)	2/16/2000 1:00:00 AM
From: semiconeng	Read Replies (2) of 1571161

This is absolutely not true. The product was plain vanilla .18 production process. If it was a CD skew wafer or not, I don't know, but that is certainly possible. And as far as I know no special cooling methods employed. PB A CD Skew Huh? That's one that I hadn't thought of. Wouldn't it be difficult to skew all the layers, or do you think that it was just "Poly Layer"? Or are you just saying that they ran an FE Wafer, and set the Focus/Exposure of the Stepper accordingly? I know when we do it, it's a big pain in the butt to maintain the desired CD's.... SemiConEng

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