Cymer was granted 7 patents in the last several days - 14 so far this year. Here are the last 7:
22-FEB-00 6,028,880 6,028,880-Automatic fluorine control system
22-FEB-00 6,028,879 6,028,879-Narrow band laser with etalon based output coupler
22-FEB-00 6,028,872 6,028,872-High pulse rate pulse power system with resonant power supply
19-FEB-00 6,026,103 6,026,103-Gas discharge laser with roller bearings and stable magnetic axial positioning
19-FEB-00 6,023,486 6,023,486-Soldered fan assembly for electric discharge laser
19-FEB-00 6,021,150 6,021,150-Laser having baffled enclosure
19-FEB-00 6,018,537 6,018,537-Reliable, modular, production quality narrow-band high rep rate F.sub.2 laser
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