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Technology Stocks : General Lithography

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To: Andrew Vance who wrote (1182)	2/28/2000 1:10:00 PM
From: Jim Oravetz	Read Replies (1) of 1305

Optical Lithography Gets Down How low can it go? By Bernard Levine How low can traditional optical lithography go? Numerical Technologies Inc. (NumeriTech), San Jose, announced the fabrication of 50 nanometer (0.05-micron) transistor gates on an integrated circuit using its patented phase-shifting software technology and DUV 248nm optical lithography. The devices were fabricated at MIT Lincoln Laboratory in Lexington, Mass., as part of a Defense Advanced Research Projects Agency-sponsored program concerning a sub-100nm, fully depleted, silicon-on-insulator (SOI) CMOS process. This is the first time 248nm lithography equipment has produced a 50nm device, NumeriTech claims.snip... electronicnews.com Jim

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