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Technology Stocks : Cymer (CYMI)
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To: orkrious who wrote (24398)3/6/2000 8:56:00 AM
From: Backfill  Read Replies (1) of 25960
 
Issued/Filed Jan. 25, 2000 / March 19, 1999

A recent Cymer F2 patent;

The present invention provides a reliable modular production quality
excimer laser capable of producing 10 mJ laser pulses in the range of
1000 Hz to 2000 Hz or greater. Replaceable modules include a laser
chamber; a pulse power system comprised of three modules; an
optical resonator comprised of a line narrowing module and an output
coupler module; a wavemeter module, an electrical control module, a
cooling water module and a gas control module. Important
improvements have been provided in the pulse power unit to produce
faster rise time and improved pulse energy control. These
improvements include an increased capacity high voltage power
supply with a voltage bleed-down circuit for precise voltage trimming,
an improved commutation module that generates a high voltage pulse
from the capacitors charged by the high voltage power supply and
amplifies the pulse voltage 23 times with a very fast voltage
transformer having a secondary winding consisting of a single
four-segment stainless steel rod. A novel design for the compression
head saturable inductor greatly reduces the quantity of transformer oil
required and virtually eliminates the possibility of oil leakage which in
the past has posed a hazard.

Jeff...
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