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Technology Stocks : Cymer (CYMI)

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To: BillyG who wrote (24647)4/7/2000 4:36:00 PM
From: jghutchison  Read Replies (1) of 25960
 
Boy you got me on that one. My impression was that a pulsed laser was preferable to CW for semi lithography. As to the lens design, I think they will still use calcium floride, since the refractive index is acceptable and it is almost transparent to the deep UV wavelengths.

I believe I read a release recently where Cymer has doubled the pulse rate and reduced the dose 50% to help alleviate the heating problem of the lens.

The boys at Hoya and OCLI could give you much better insight on this.

Jack Hutchison
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