Trikon Receives Low-K CVD and M0RI Plasma Etch Orders From LSI Logic
NEWPORT, Wales, U.K.--(BUSINESS WIRE)--April 11, 2000--
Trikon and LSI Logic to provide industry leading, fully integrated Low-k solution for the manufacture of advanced communications products
Trikon Technologies, Inc. (OTC BB:TRKN) announced today that LSI Logic Corporation (NYSE:LSI) has ordered Trikon's Planar fxP(TM) Low K Flowfill(TM) and M0RI(TM) Omega(R) plasma etcher for utilization in LSI Logic's advanced CMOS process technologies.
Trikon's Low K Flowfill(TM) equipment and processes are already in production at LSI Logic's global manufacturing facilities with aluminum. The new orders will be incorporated into LSI Logic's G12(TM) (0.18 micron drawn) and Gflx(TM) (0.13-micron drawn) process technology generations for the manufacture of advanced communications products as well as being used for development of integrated low-k and copper processes. Using low-k in 0.18-micron provides a 36 percent performance improvement over standard k material. That is higher than processes utilizing copper.
Trikon's newest generation of advanced low-k dielectric manufacturing equipment will first be used at LSI Logic's Santa Clara, California R&D facility before being utilized at the company's other fabrication facilities around the world.
"Our world class manufacturing capability is a competitive advantage for LSI Logic," said Rich Schinella, LSI Logic vice president of Wafer Process R&D and Santa Clara Operations. "We teamed with Trikon to develop an advanced low-k dielectric manufacturing process initially for our high performance 0.18-micron process. The qualified methyl-silane solution provided by Trikon and LSI Logic is truly setting the industry standard for effective low-k manufacturing. The knowledge base that we have gained by working with Trikon has set the stage for the incorporation of copper interconnects into a well characterized and understood low-k substrate."
"This order demonstrates that Trikon is at the leading edge of developments in low-k technology and the inclusion of copper into these technologies," said Nigel Wheeler, Trikon president and chief executive officer. "We are pleased to have the opportunity to collaborate once again with communications chip leader LSI Logic as it enhances its world class manufacturing processes."
Trikon's new technology products include:
Planar fxP(TM) Low K Flowfill(TM). An advanced low-k dielectric deposition system capable of both gap fill and planarization enabling the low-k advantage of increased device speed to be brought to existing aluminum metalization devices as well as copper.
Sigma(R) fxP(TM) PVD. A metalization system offering high throughput and reliability with advanced process modules for high uniformity PVD, metal plug (Forcefill(R)) and advanced barrier deposition processes including ionized PVD.
M0RI(TM) Omega(R). An advanced high-density plasma etcher on a small footprint platform. The Omega(R) etcher can be configured with two chambers offering plasma etching and dedicated post etch processing or dual chambers for higher throughput. The M0RI(TM) Omega(R) selected by LSI features a second process chamber dedicated to photoresist stripping without damaging the etched low-k dielectric.
Trikon has recently made announcements including:
- Repeat orders from TriQuint for PVD and plasma etch equipment
for GaAs processing
- Leading North American communications company orders 8 plasma
etch and plasma CVD systems for optoelectronics device
manufacture
- Exchange of bonds and preferred notes for common stock
reducing dividend payable in fiscal 2000 by $1.1m and reducing
interest payable by $72,000
- Tower Semiconductor Ltd. order additional Flowfill(R) and
Forcefill(R) systems for production expansion
- 1999 financial results. Product sales up 92% on 1998
- First Asian foundry order for Low K Flowfill(TM)
- The first production orders for Low K Flowfill(TM)from LSI
Logic Corporation
About Trikon Technologies
Trikon www.trikon.com is positioned at two technology frontiers in the equipment industry based on solid production experience earned over 30 years. Trikon offers enabling production equipment for the manufacture of Gigahertz silicon and broadband wireless and optoelectronics communications devices. This latest order from LSI signals Trikon's capabilities at the Gigahertz edge in Silicon. Trikon's patented, 'patent applied for' and proprietary technologies are delivered on equipment platforms used worldwide for volume production. Trikon operates and manufacturers at a 115,000sq.ft. facility featuring world-class facilities and ISO9000 (quality) and ISO1401 (environmental) registration. Trikon has patents and patents pending on Flowfill(R) and Low K Flowfill(TM) and related processes and continues to develop low-k chemistries and processes for advanced applications. Trikon provides a broad line of advanced manufacturing systems used for three of the major processing steps in the manufacture of a semiconductor device: chemical vapor deposition (CVD), physical vapor deposition (PVD) and plasma etch. Products include: Low K Flowfill(TM) for advanced low-k insulator deposition, Sigma(R) fxP(TM) for advanced metal deposition including barrier layers and M0RI(TM) high-density plasma etchers.
About LSI Logic Corporation
LSI Logic Corporation (NYSE:LSI) is a leading supplier of communications chips for broadband, data networking, wireless and set-top box applications. In addition, the company provides chips and boards for network computing and supplies storage network solutions for the enterprise. LSI Logic is headquartered at 1551 McCarthy Boulevard, Milpitas, CA 95035, 408-433-8000, www.lsilogic.com.
"Safe Harbor" Statement Under the Private Securities Litigation Act of 1995: This news release contains certain forward-looking statements, including, but not limited to, statements relating to the continued strength in demand for semiconductor production equipment and the status of Trikon's products and their acceptance in the marketplace. These forward-looking statements are subject to various risks and uncertainties that could cause results to differ materially, including, but not limited to, (1) that the semiconductor industry will experience conditions, such as changes in demand for various types of semiconductors, that will affect the demand for semiconductor production equipment and Trikon's products, (2) that Trikon will not adequately respond to technological developments impacting the semiconductor industry, (3) market acceptance of Trikon's advanced products will not be forthcoming. These factors are not intended to represent a complete list of all risks and uncertainties inherent in the Company's business, and should be read in conjunction with the more detailed cautionary statements included in the company's SEC reports, including, without limitation, its annual report on Form 10-K, quarterly reports on Form 10-Q and current reports on Form 8-K.
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CONTACT: Trikon media contact: Trikon Technologies, Newport
Carl Brancher
44 (O) 1633 414111 (UK) carl.brancher@trikon.com
or
contact:
Ludgate Communications, New York
Alexander Fudukidis
212/515-0246
fudukidi@ludgateny.com |
