Tuesday May 16, 9:01 am Eastern Time
Company Press Release
SVG Ships First APNext CVD System to a Major Foundry in Taiwan
SAN JOSE, Calif.--(BUSINESS WIRE)--May 16, 2000--Silicon Valley Group (Nasdaq:SVGI - news) announced today that a major foundry in Taiwan is the first to take delivery of the APNEXT(TM), Thermal System's newest vertical cluster tool for chemical vapor deposition (CVD) applications. The system, which shipped on April 29, will be evaluated for its advanced shallow trench isolation (STI) process capability and productivity.
``This innovative product strengthens SVG's position as a leading worldwide supplier of STI processes,'' noted Don Tran, SVG Thermal Systems vice president of marketing. ``APNext offers our customers a cost-effective single-wafer solution for shallow trench isolation applications, and its production proven linear injector design offers unsurpassed gap-fill and film uniformity for pre-metal dielectric and STI at 130 nm and below.''
The APNext is a single wafer processing tool for 200 mm or 300 mm wafer fabrication. The system utilizes SVG's patented Multiblok(TM) linear injector technology to deposit high quality doped and undoped silicon dioxide films with superior gapfill capability. The APNext system is comprised of four process chambers with an automated front end to load and unload each chamber. The four chambers are arrayed in a unique vertical cluster configuration for high throughput and efficient utilization of fab floor space.
``This powerful single wafer CVD tool combines flexibility, productivity and advanced technology to directly address the challenging needs of foundry semiconductor manufacturers,'' said Jeff Kowalski, president of SVG Thermal Systems. ``It is the most logical production choice available today.''
About Silicon Valley Group
Silicon Valley Group (Nasdaq: SVGI - news) is a leading manufacturer of automated wafer processing equipment for the worldwide semiconductor industry. The company designs, manufactures and markets technically sophisticated equipment used in the primary stages of semiconductor manufacturing. Its products include photolithography exposure tools; photoresist processing equipment; oxidation, diffusion and low-pressure chemical vapor deposition processing systems; atmospheric pressure chemical vapor deposition systems and precision optical components and systems. For more information, visit svg.com.
Forward-looking Statement Disclaimer: The matters discussed in this news release include forward-looking statements made by the Company's Thermal Systems president that involve risks and uncertainties including but not limited to economic conditions, industry conditions, trade environment and other risks discussed more fully in filings by the Company with the Securities and Exchange Commission. Reference is made to the Company's most recent Forms 10K and 10Q, which detail such risk factors.
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Contact:
Silicon Valley Group
Werner Rust, 408/467-5949 (Client Contact)
rustw@svg.com
Nancy Szymanski, 408/467-5870 (Investment Relations)
szymansn@svg.com
or
Mathews & Clark Communications (Agency Contact)
Stew Chalmers, 408/736-1120
schalmers@mathewsandclark.com |
