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To: Ritz who wrote (330)	5/16/1997 2:40:00 PM
From: Andrew Vance	of 1305

300mm steppers could be made available at almost anytime. A complete redeign is not required. It will require a larger wafer handler and a stage with a longer travel. No optical upgrades or lens upgrades are required. Think of a classical microscope. You only look at a certain part of the specimen under the scope. Each lens allows viewing over a specific field over view. You must move the specimen under the lens if you want to see other parts of the specimen. This is done by move the specimen under the lens with the microscope stage. Normal biological slides are 1" by 3", I believe. If you want to increase the specimen slide to a 3" by 9" configuration you would need a larger specimen holder and a specimen stage with enough x-y travel to reach all parts of the new specimen plate. The viewing optics and the field of view have not been modified and do not need to be modified. The same holds true for the majority of steppers. IF you need to improve your magnification capbilities and maintain the same field of view, you run into a major redesign of the microscope. New lenses and optics will be required. For a majority of the other equipment, you have major issues going to 300mm which require redeigning of the equipment. The easiest analogy is the perfect omelette on your stove. If you have a 6" skillet on an 8" diameter heating coil, you most certainly have an ideal situation where you will most likely get a uniform heating of the skillet. When you put an 8" skillet on the heating element, you may still get good results, but you are living on the edge relative to uniform heat distribution across the skillet. Go to a 12" skillet on the 8" heating element and you are screwed. You need a bigger heating element and that new element needs to be as tightly controlled as the 8" element. You probably have to redesign the element because a scale up probably just does not do the job. Hey, I gave it a shot.

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