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Technology Stocks : General Lithography
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To: Andrew Vance who wrote (335)5/16/1997 3:59:00 PM
From: Ed Beers   of 1305
 
Andrew,

If you upgrade your stepper to a 300mm design by only modifying the
wafer handler and stage, what is the effect on throughput. Do current
steppers spend most of their time loading and aligning the wafer or
stepping and exposing?

If stepping and exposing is the bottleneck then the number of
steppers required to produce a given number of chips is independent
of the wafer size. This is very different in terms of sales than
other equipment like etchers which act on the entire wafer at once.

Or will we see a new generation of stepper with larger field size,
shorter exposure periods, and faster stepping. All of these
improvements (smaller feature size with larger field; larger and
heavier wafer with faster and more precise stepping) sound
challenging to me.

Will this change the proportion of money spent on stepper vs other
equipment?

Ed
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