Axcelis Technologies, Inc. Receives Multiple Order for Photostabilizers
Dual Chamber Photostabilizer System of Choice for North American Integrated Communications Manufacturer
BEVERLY, Mass.--(BUSINESS WIRE)--Aug. 22, 2000-- Axcelis Technologies, Inc, (NASDAQ:ACLS - news) formerly Eaton Semiconductor Equipment Operations, and manufacturers of ion implantation, rapid thermal processing (RTP), photoresist dry strip and photostabilization tools, today announced that a global leader in integrated communications has placed multi-million dollar orders for 10 FusionGemini Photostabilizers. The systems will be installed in the company's North American IC manufacturing facilities throughout the year.
``This order signifies our customer's confidence in photostabilization technology and the productivity advantages it offers this valued client,'' said Mary Puma, president of Axcelis Technologies, Inc. ``Axcelis' FusionGemini Photostabilizers' first-to-market technology is critical to assuring the accurate transfer of original patterns after the lithography process, resulting in a tremendous cost savings to IC manufacturers.''
The FusionGemini Photostabilizer preserves critical dimensions and boosts the performance of etch and implant processes. By producing a cross-linked, stable resist layer and locking in the photoresist pattern, the FusionGemini enables photoresist mask uniformity while minimizing process variation and improving photoresist stability, sidewall integrity and high current/high energy high dosage implants. This customer selected the FusionGemini system based on the tool's photoresist pre-treatment capability before etch and implant steps, which allows high yields in smart technology manufacturing.
Axcelis has more than 15 years of photostabilizer experience with an installed base of more than 2,000 photostabilizers worldwide.
About Axcelis Technologies, Inc.
Axcelis Technologies, Inc., headquartered in Beverly, Massachusetts, provides innovative, high-productivity manufacturing solutions for the semiconductor industry. Axcelis is dedicated to the design and manufacture of high current, medium current and high energy ion implantation equipment; fast ramp vertical furnaces and rapid thermal processing systems; and photostabilization and photoresist stripping equipment. Axcelis Technologies has manufacturing facilities in Beverly and Rockville, Maryland, as well as in Toyo, Japan through its joint venture with Sumitomo Eaton Nova. The company's Internet address is: www.axcelis.com.
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Contact:
Company Contact:
Elizabeth Burnside
Axcelis Technologies, Inc.
(978) 232-4273
elizabeth.burnside@axcelis.com
or
Analyst Contact:
Jan Paul van Maaren
Axcelis Technologies, Inc.
(978) 232-4213
janpaul.vanmaaren@axcelis.com
or
Agency Contact:
Gabrielle Svenning
The Loomis Group Inc.
(617) 638-0022
gabrielle@loomisgroup.com |
