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Technology Stocks : General Lithography

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To: FJB who wrote (347)	5/21/1997 3:19:00 PM
From: Andrew Vance	of 1305

It looks fishy to me on the surface. We know that UTEK was going to compete in the 248nm arena and all the numbers look good with 2 exceptions. 1. The high NA of the lens 2. The poor DOF relative to other systems You know I am a BULL on UTEK but these two specs have me questioning things. I will be talking to some people on this table presented. I am pleasantly surprised to see the high NA and want to verify this is real. However, I have always spoken quite highly of the superior DOF UTEK systems have. This is not the case here and may be due to the large field size. BTW- I though the field size would be 22mm x 44mm. I do like that it is the only system mentioned with 12" wafer size. Very good information but I would like to verify with other sources. thanks for the update. Andrew

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