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Technology Stocks : General Lithography

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To: Ritz who wrote (350)	5/21/1997 4:11:00 PM
From: Andrew Vance	of 1305

NA/DOF should inversely proportional as you state. This is why I am concerned that UTEK is allowing itself to go this way (like the herd). Ultrabeam is the vehicle for these types of reticles. Can they be made now? YES Can they be made in production quantities? I DO NOT THINK SO. There is an Advanced Reticle Symposium being held in The Fairmont Hotel in San Jose, CA on 6/3/97. It is being sponsored by UTEK, DPMI, PLAB in conjunction with Microlithography World and Solid State Technology Magazines. The potential answers to this question will be discussed there. I will try to get a copy of the proceedings. Andrew

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