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Technology Stocks : General Lithography

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To: Yousef who wrote (355)5/22/1997 10:07:00 PM
From: Andrew Vance   of 1305
 
Yousef-what is your take on the patent issue relative to the step and scan systems for the 193nm and below systems. My understanding is that ISI owns the patent and that SVGL has been given permission to utilize it in the Micrascan system. I also understand that ISI will prosecute others that try to infringe on its patent.

Admittedly, I have not been following this for awhile so I am curious if you have any insight into this matter.

Your R&D comment concerning the ISI system is quite accurate. It is an excellent tool and will give a step up for those like SEMATECH. The system is capable of being a production tool but the size of ISI prevents them from filling any large orders that might come from the likes of an IBM or INTC. Even SVGL was forced to expand its manufacturing capability for the Micrascan recently because they realize orders from 3 majors like IBM, INTC and one other could consume all their production capacity.

Unfortunately the real problem, as I see it, is that the Japanese companies (Nikon and Canon) have much more manufacturing capacity for steppers than almost all the US vendors and ASMLF together. Rough figures have Nikon and Canon capable of 500+ systems each with ASMLF next at under 300 and SVGL maybe in the 200 range. I think quality is not much of an issue these days in steppers since all available systems are highly reliable. I think the ability to ship quantity is where the Nikons and Canons kick our collective butts.

Andrew
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