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Technology Stocks : General Lithography
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To: Andrew Vance who wrote (356)5/22/1997 10:29:00 PM
From: Yousef   of 1305
 
Andrew,

I have no specific info regarding to the patent in your post. I am
surprised that ISI would have a patent like that. I expected SVGL
to have almost all patents relating to scanning lithography. As you
are aware I'm sure, SVGL purchased Perkin Elmer which produced a
1X full wafer scanner (PE140, 240 ...). Also, Perkin Elmer before
this merger had already purchased Censor, a g-line stepper, and
combined this with the scanner to produce the first step-and-scan.
The PE 1X scanning patents have probably already expired.

Nikon has already shipped a few step-and-scan systems (S201's) in the
US and I believe that ASML will have one available soon.

Tell me more about this particular patent issue, sounds interesting.

Yousef
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