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Technology Stocks : General Lithography

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To: Ritz who wrote (350)	5/26/1997 12:31:00 PM
From: John Wang	of 1305

Ritz, Andrew: Resolution is inversely proportional to NA. But, DOF is inversely proportional to the square of NA as stated in IBM's article. So, to get high resoltion by increasing NA, we sacrifice DOF a lot. Besides, high NA lense is very difficult to make. It has to correct all aberations, distortion, astigmatism, etc. That's why Zeiss can only make so many a year. This is an interesting site. This is the first time I peeped in. Keep up the good work! John

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