Andrew
I posted some comments on this thread that were viewed as negative and prompted others to ask your opinion. I read your answer, and I don't see that you are saying anything other than what I was saying. If you are involved in the industry, I would like your opinion as to when you think that cyrogenic cleaning or ozone/UV technology will be incorporated into any process flows? You might educate the readers on this thread on the time constant involved in incorporating a new process technology into a production fab. IMHO, it can take up to 3-5 years for something new in this area to achieve any appreciable acceptance so that it has a positive affect on the supplier's bottom line. The technolgy has to be enabling, compelling, tested, verified, placed in new process flows, fabs built for the new process flows, equipment purchased for the new fabs, products qualified etc. The SIA roadmap and SEMATECH calls for new cleaning technologies to be required for the .08 micron technology node. Until then, it is a wet processing game. FSI's tools used to be the hot item as you point out, but it appears CFM and Semitool may have passed them by. 5% market share is nothing to crow about. Just look at how long it has taken CMP processing to catch on.
The Polaris is an exiciting tool. They just need to start booking some mega orders for this to take off.
I hope FSI gets bookings soon. |
