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Technology Stocks : General Lithography
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To: Ian@SI who wrote (370)5/29/1997 9:29:00 PM
From: James Word   of 1305
 
Ian
Actually, X-Ray steppers are nothing new. In fact, I believe IBM
built an entire DRAM fab around X-Ray steppers. I believe the
concept was consired by most to be a bit ahead of it's time. They
have been working with this technology for years and are probably just
about as advanced as anyone out there. They actually have the only
commercial X-Ray Reticle shop in the world.
You can buy X-Ray steppers commercially from Germany's Karl Suss,
and if you are big and powerfull (like IBM) can probably get prototypes from most other stepper vendors.
The issues preventing widespread use of X-Ray are still the same:
1.) Very tough to make Reticles.
2.) No reduction steppers available (because of the difficulty with
X-Ray opitcs). This lack of reduction technology makes the
first problem (reticles) even worse.
3.) Synchrotron rings are expensive for initial investment. This is
the smallest problem because one ring can supply X-Rays to several
steppers.

I won't be investing in a lead bunny-suit any time soon.

James Word
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