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Technology Stocks : General Lithography

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To: James Word who wrote (371)	5/30/1997 1:46:00 AM
From: Andrew Vance	of 1305

<Synchrotron rings are expensive for initial investment. This is the smallest problem because one ring can supply X-Rays to several steppers.> I believe somewhere in Germany there is an operational factory that has this technology in use for a number of years. Also, I believe more than a decade ago, there was a company called Micronix that had a 1X X-ray stepper or scanner. The CEO was I beleive a Sam Harrell. The system was functional but they also made the masks which a had a pathetic yield and horrendous cycle time. I beleive it was silicon nitride or Boron nitride with a gold coating, among other things. This goes back to the days when everyone was convinced Optical Lithography would run out of steam at around 1.0 micron. X-Ray was a decade or more ahead of its time and still may be farther out. No one really knows how far DUV and EUV will be able to be pushed given it is still a reduction technology. I always enjoy reading about X-ray and Ion Beam technology replacing conventional lithography. It is nice reading but we never seem to assimilate it into the process. Our small group of Lithography Wizards seem to concoct yet another means of avoiding dramatic changes to our "comfortable" domains.<GGG> Andrew

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