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Pastimes : Let's Build a School to Start the New Year!
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To: Proud_Infidel who wrote (81)1/5/2001 5:49:17 PM
From: FJB   of 198
 
EUV gains as venture ends e-beam litho work

AUSTIN, Texas — Momentum appears to have swung sharply toward extreme-ultraviolet technology (EUV) as the next-generation lithography solution following a recent decision by ASM Lithography and Applied Materials Inc. to dissolve eLith LLC, a joint venture formed 14 months ago to commercialize the Scalpel electron-beam projection lithography (EPL) technology developed at Bell Labs.
eet.com
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